EDGE INSPECTION DEVICE

PROBLEM TO BE SOLVED: To provide an edge inspection device having an inexpensive simple structure, and equipped with the convenience of being mounted on an optical observation device for executing inspection on an edge of a substrate by using the function of the observation device. SOLUTION: In this simply structured edge inspection device, a plurality of reflecting mirrors 2, 3, and 4 are held by a mirror hold part 5 so as to provide limits of observational view making detour to the edge 7a of the substrate and to both sides connected to the edge 7a, and a mirror evacuation mechanism 10 (with a mirror hoisting mechanism included) is provided for therefrom evacuating/moving the hold part 5. With this inspection device mounted on a real-image microscope serving as the optical observation device 11, an image is created which is obtained by turning a defect into a real image throughout a range of the edge 7a of the substrate from its surface to backside to simply perform inspection/determination by visual inspection. COPYRIGHT: (C)2007,JPO&INPIT