LAMINATE AND ITS LASER PROCESSING METHOD
PROBLEM TO BE SOLVED: To provide a laminate capable of preventing the peeling or separation of a film at the time of laser processing, and its laser processing method. SOLUTION: The laminate 1 comprises a substrate 2, the film 3 provided on the substrate 2 and the heat conductive layer 4 provided be...
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Zusammenfassung: | PROBLEM TO BE SOLVED: To provide a laminate capable of preventing the peeling or separation of a film at the time of laser processing, and its laser processing method. SOLUTION: The laminate 1 comprises a substrate 2, the film 3 provided on the substrate 2 and the heat conductive layer 4 provided between the substrate 2 and the film 3. The heat conductive layer 4 has heat conductivity higher than that of the film 3. When the substrate 2 is irradiated with a laser beam from the side opposite to the film 3 so that the laser beam passes through the heat conductive layer 4, a through-hole 5 is formed to the laminate 1. At this time, the heat caused by the laser beam L is absorbed by the heat conductive layer 4, so that the transmission of heat to the film 3 is sufficiently prevented. By this constitution, the peel on damage of the film 3 can be prevented. COPYRIGHT: (C)2007,JPO&INPIT |
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