ADSORBING AND CARRYING DEVICE FOR PLATE-LIKE WORKPIECE, AND CARRYING METHOD USING THE SAME

PROBLEM TO BE SOLVED: To provide an adsorbing and carrying device which positively and smoothly adsorbs and holds a plate-like workpiece mounted on a base of a workpiece processing device from which a plurality of guide pins protrudes, and to provide a plate-like workpiece carrying method. SOLUTION: When a support frame 15 of the adsorbing and carrying device goes down to adsorb a flexible printed circuit (FPC) 11 via vacuum pads 16, the tip of each guide pin 14 is fitted into a cylindrical magnet 19 hung from the support frame 15, and a lower surface of the cylindrical magnet 19 abuts on an upper surface of the FPC 11. Herein a cylindrical bush 18 is attracted by the magnetism of the cylindrical magnet 19, and therefore the FPC 11 is pinched by the cylindrical magnet 19 and the cylindrical bush 18, which prevents the FPC 11 from deflecting, whereby the FPC 11 is positively adsorbed by the vacuum pads 16. When the FPC 11 is elevated to a predetermined height, elevation of the cylindrical bush 18 is inhibited, and therefore the cylindrical bush 18 separates from the lower surface of the FPC 11 to return to its original position, to thereby smoothly pull the guide hole 12 of the FPC 11 from the guide pin 14. COPYRIGHT: (C)2007,JPO&INPIT