PHOTORESIST FEEDER

PROBLEM TO BE SOLVED: To provide a photoresist feeder for reducing the consumption of inert gas such as nitrogen, and for stably and continuously supplying a photoresist from which air bubbles are completely removed. SOLUTION: A photoresist feeder is configured to continuously supply the photoresist...

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Bibliographische Detailangaben
Hauptverfasser:	MATSUOKA HARUYUKI, TAKASAKI NORIHIRO
Format:	Patent
Sprache:	eng
Schlagworte:	APPARATUS FOR APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TOSURFACES, IN GENERAL APPARATUS SPECIALLY ADAPTED THEREFOR APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TO SURFACES, IN GENERAL BASIC ELECTRIC ELEMENTS CINEMATOGRAPHY ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY ELECTROGRAPHY HOLOGRAPHY MATERIALS THEREFOR ORIGINALS THEREFOR PERFORMING OPERATIONS PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS SEMICONDUCTOR DEVICES SPRAYING OR ATOMISING IN GENERAL TRANSPORTING
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To provide a photoresist feeder for reducing the consumption of inert gas such as nitrogen, and for stably and continuously supplying a photoresist from which air bubbles are completely removed. SOLUTION: A photoresist feeder is configured to continuously supply the photoresists carried in by portable containers (1a) and (1b) to a processing process by a pump (4). The feeder is provided with liquid delivery lines (L1), (L2) and so on from the portable containers (1a) and (1b) to the pump (4), and the respective liquid delivery lines (L1) and (L2) are provided with intermediate containers (2a) and (2b), respectively, for temporarily storing the photoresists extracted from the portable containers (1a) and (1b). The intermediate containers (2a) and (2b) are configured as vapor liquid separators for exhausting separated gas, and the plurality of systems of liquid delivery lines (L1) and (L2) are configured so as to be switched according to quantities of liquids of the intermediate containers (2a) and (2b). COPYRIGHT: (C)2007,JPO&INPIT