CORRECTOR FOR CORRECTING CHROMATIC ABERRATION IN PARTICLE OPTICAL DEVICE
PROBLEM TO BE SOLVED: To provide a corrector for correcting chromatic aberration in a particle optical device. SOLUTION: This corrector corrects chromatic aberration in a particle lens used for an SEM/TEM. For reducing requirements for stability in power supply to the corrector, energy of an electro...
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| Zusammenfassung: | PROBLEM TO BE SOLVED: To provide a corrector for correcting chromatic aberration in a particle optical device. SOLUTION: This corrector corrects chromatic aberration in a particle lens used for an SEM/TEM. For reducing requirements for stability in power supply to the corrector, energy of an electron beam passing through the corrector is lower than that of the electron beam passing through the lens to be corrected. COPYRIGHT: (C)2007,JPO&INPIT |
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