ELECTROMAGNETIC INDUCTION TYPE INSPECTION DEVICE AND METHOD THEREFOR

PROBLEM TO BE SOLVED: To provide an electromagnetic induction type inspection device and method therefor capable of inspecting and detecting all of the inspecting object regardless of dielectric body and electromagnetic body highly precisely and capable of measuring the object regardless of the size of the object, and capable of easily performing miniaturization. SOLUTION: The inspection device 1 of electromagnetic induction type forms magnetic field by impressing AC current on the excitation coil 21 upon inspection, the induction coil 22 (22a, 22b) detects the variation of magnetic field formed by the excitation coil caused by the inspection object, the DC voltage obtained by subtracting the DC voltage of standard inspection object from the amplified and rectified DC voltage regarding the amplitude of the voltage signal output from the induction coil 22, and the phase difference voltage subtracted with the same phase difference voltage of the standard inspection object is calculated from the voltage regarding the phase difference between the phase of the voltage signal output from the induction coil 22 and the phase of excitation coil 21, and the inspection object 90 is determined from these values. COPYRIGHT: (C)2007,JPO&INPIT