CHARGED PARTICLE BEAM IRRADIATION METHOD AND CHARGED PARTICLE BEAM DEVICE

PROBLEM TO BE SOLVED: To provide a charged particle beam irradiation method improving accuracy of a contour line irrespective of the shape of a processing area of a sample when processing the sample by a charged particle beam device. SOLUTION: A computer 13 sets a processing area on the basis of an image obtained by observing a mask 8, and determines a position of representative point constituting the contour of the processing area at a central position of the pixel or a position shifted from the central position of the pixel at every pixel with sub-pixel accuracy more accurate than that of a pixel. Further, on the pixel in the processing area, the computer 13 determines the central position of the pixel as a representative point, and corrects the position of the representative point of the pixel in the processing area with a unit of the sub-pixel so as to reduce roughness and fineness of the representative points. When processing the mask 8, on the pixel in which a contour of the processing area is included, charged particle beams 2 are irradiated on the position of the representative points constituting the contour, and on the pixel in the processing area, the beams are irradiated on the position of the corrected representative points. COPYRIGHT: (C)2007,JPO&INPIT