SHEET-LIKE PROBE, MANUFACTURING METHOD THEREOF, AND APPLICATION THEREOF

PROBLEM TO BE SOLVED: To provide a sheet-like probe and manufacturing method thereof capable of achieving stable connecting conditions to even circuit devices including minute and fine pitched electrodes and preventing positional deviation between an electrode constructing body and a test electrode caused from temperature variation in burn-in tests. SOLUTION: The sheet-like probe 10 is deployed separately each other along the direction of the surface of an insulated layer 18B and has a contact point film equipped with a plurality of electrode constructing bodies 15 extending to penetrate into the thickness direction of the above insulating layer, while each of the above electrode constructing body comprises a surface electrode part 16 exposing to the surface of the insulating layer and projecting from the surface of insulating layer, a rear surface electrode part 17 exposing to rear surface of the aforementioned insulating layer, a short circuit section 18 extending to penetrate sequentially into the insulating layer in its thickness direction from the starting edge of the surface electrode part to connect with the rear surface electrode part, and a holding part 19 formed so as to be in semi-buried condition within the insulating layer while extending outward along the surface of the aforementioned insulating layer. COPYRIGHT: (C)2007,JPO&INPIT