PANEL MEMBER INSPECTION DEVICE, AND PANEL MEMBER INSPECTION PROGRAM APPLIED THERETO

PROBLEM TO BE SOLVED: To provide an excellent panel member inspection device capable of effectively preventing damages or adhesion of fouling by reduction of the number of times of conveyance of a panel member, while performing a plurality of grade inspections, and improving a processing throughput...

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Bibliographische Detailangaben
Hauptverfasser:	OTSUKI KUNIO, KO MASAAKI
Format:	Patent
Sprache:	eng
Schlagworte:	DEVICES OR ARRANGEMENTS, THE OPTICAL OPERATION OF WHICH ISMODIFIED BY CHANGING THE OPTICAL PROPERTIES OF THE MEDIUM OF THEDEVICES OR ARRANGEMENTS FOR THE CONTROL OF THE INTENSITY,COLOUR, PHASE, POLARISATION OR DIRECTION OF LIGHT, e.g.SWITCHING, GATING, MODULATING OR DEMODULATING FREQUENCY-CHANGING MEASURING MEASURING ANGLES MEASURING AREAS MEASURING IRREGULARITIES OF SURFACES OR CONTOURS MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS NON-LINEAR OPTICS OPTICAL ANALOGUE/DIGITAL CONVERTERS OPTICAL LOGIC ELEMENTS OPTICS PHYSICS TECHNIQUES OR PROCEDURES FOR THE OPERATION THEREOF TESTING TESTING STATIC OR DYNAMIC BALANCE OF MACHINES ORSTRUCTURES TESTING STRUCTURES OR APPARATUS NOT OTHERWISE PROVIDED FOR
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To provide an excellent panel member inspection device capable of effectively preventing damages or adhesion of fouling by reduction of the number of times of conveyance of a panel member, while performing a plurality of grade inspections, and improving a processing throughput by shortening of a conveyance time or reduction of the number of times of constraint of an operator. SOLUTION: The device is constituted so that a plurality of inspection recipes applied to the panel member are performed in one-time carrying-in/out process from carrying-in of the panel member from a prescribed storing place until carrying-out thereof. The device includes: a panel mounting stand 3 for mounting the panel member; a plurality of different inspection apparatus 6 capable of executing the plurality of inspection recipes, respectively; a movement control part 8b for controlling relative movement between the panel mounting stand 3 and the inspection apparatus 6 according to the plurality of inspection recipes to be executed; and an inspection recipe execution control part 8c for controlling so that the plurality of inspection recipes to be executed are executed respectively by each corresponding inspection apparatus 6. COPYRIGHT: (C)2007,JPO&INPIT