PHOTOSENSITIVE RESIN COMPOSITION AND ARTICLE

PROBLEM TO BE SOLVED: To provide a photosensitive resin composition which shows a great contrast of a solubility rate regardless of the kind of a polymer precursor, especially of a polyimide precursor, and consequently can give a pattern with an excellent shape at a low cost while retaining a suffic...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: FUKUDA TOSHIHARU, SAKAYORI KATSUYA
Format: Patent
Sprache:eng
Schlagworte:
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