ALUMINA-BASED SINTERED COMPACT, MEMBER FOR TREATING DEVICE USING THE SAME, TREATING DEVICE, AND METHOD FOR TREATING SAMPLE

PROBLEM TO BE SOLVED: To provide an alumina-based sintered compact in which the difference between the values of tanδ at a surface layer part and an inner part is small. SOLUTION: The alumina-based sintered compact is characterized in that the alumina purity is ≥99-99.7 mass% and the maximum peak in...

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Hauptverfasser: KAJIWARA ISATERU, INOUE SATOYUKI
Format: Patent
Sprache:eng
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Zusammenfassung:PROBLEM TO BE SOLVED: To provide an alumina-based sintered compact in which the difference between the values of tanδ at a surface layer part and an inner part is small. SOLUTION: The alumina-based sintered compact is characterized in that the alumina purity is ≥99-99.7 mass% and the maximum peak intensity of α-alumina crystal phase, measured by X-ray diffraction method, is assigned to (104) plane in a surface layer part and to (113) plane in an inner part at a depth of ≥10 mm from the surface layer part. COPYRIGHT: (C)2007,JPO&INPIT