ALUMINA-BASED SINTERED COMPACT, MEMBER FOR TREATING DEVICE USING THE SAME, TREATING DEVICE, AND METHOD FOR TREATING SAMPLE
PROBLEM TO BE SOLVED: To provide an alumina-based sintered compact in which the difference between the values of tanδ at a surface layer part and an inner part is small. SOLUTION: The alumina-based sintered compact is characterized in that the alumina purity is ≥99-99.7 mass% and the maximum peak in...
Gespeichert in:
Hauptverfasser: | , |
---|---|
Format: | Patent |
Sprache: | eng |
Schlagworte: | |
Online-Zugang: | Volltext bestellen |
Tags: |
Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
|
Zusammenfassung: | PROBLEM TO BE SOLVED: To provide an alumina-based sintered compact in which the difference between the values of tanδ at a surface layer part and an inner part is small. SOLUTION: The alumina-based sintered compact is characterized in that the alumina purity is ≥99-99.7 mass% and the maximum peak intensity of α-alumina crystal phase, measured by X-ray diffraction method, is assigned to (104) plane in a surface layer part and to (113) plane in an inner part at a depth of ≥10 mm from the surface layer part. COPYRIGHT: (C)2007,JPO&INPIT |
---|