INTEGRATED CIRCUIT INCLUDING MICRO-MACHINE SWITCH, MANUFACTURING METHOD OF INTEGRATED CIRCUIT, AND ELECTRONIC CIRCUIT INCLUDING INTEGRATED CIRCUIT

INTEGRATED CIRCUIT INCLUDING MICRO-MACHINE SWITCH, MANUFACTURING METHOD OF INTEGRATED CIRCUIT, AND ELECTRONIC CIRCUIT INCLUDING INTEGRATED CIRCUIT

PROBLEM TO BE SOLVED: To provide a MEMS switch for which a standard CMOS process is applicable, and its manufacturing method. SOLUTION: This integrated circuit is formed by a CMOS process, and includes circuit parts (301 to 303) and at least one micro-machine switch. At least the one switch has an a...

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Bibliographische Detailangaben
1. Verfasser: PALLARES CUXART JOFRE
Format: Patent
Sprache:eng
Schlagworte:
BASIC ELECTRIC ELEMENTS
ELECTRIC SWITCHES
ELECTRICITY
EMERGENCY PROTECTIVE DEVICES
MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES
MICROSTRUCTURAL TECHNOLOGY
PERFORMING OPERATIONS
PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTUREOR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
RELAYS
SELECTORS
TRANSPORTING
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Zusammenfassung:PROBLEM TO BE SOLVED: To provide a MEMS switch for which a standard CMOS process is applicable, and its manufacturing method. SOLUTION: This integrated circuit is formed by a CMOS process, and includes circuit parts (301 to 303) and at least one micro-machine switch. At least the one switch has an actuator electrode (11) corresponding to a first conductive layer, at least one contact electrode (21, 22) corresponding to a second conductive layer, and a movable conductive element (31) corresponding to a third conductive layer. Moreover, this relates to the manufacturing method of the integrated circuit having the switch, and a circuit incorporating the switch. COPYRIGHT: (C)2007,JPO&INPIT