PLASMA TREATMENT DEVICE BY SINGLE HEAD, PLURAL JET PORTS

PROBLEM TO BE SOLVED: To provide a plasma treatment device, capable of efficiently carrying out plasma treatment on a plurality of treating surfaces using simple equipment requiring small space. SOLUTION: The plasma treatment head 10 comprises at least a pair of electrodes 12, 14 mutually facing each other, and a plurality of jet ports 11a, 11b communicating with a space 11x (hereinafter, called "discharge space") between the electrodes 12, 14. The plurality of jet ports 11a, 11b are arranged so as to face respectively different areas 1a, 1b of the treating object 1. By impressing a voltage on the electrodes 12, 14, electric discharge is generated in the discharge space 11x and the treating gas, which is made to pass the discharge space 11a and has become plasmatic is made to flow out to different directions from the plurality of jet ports 11a, 11b, and the treatment gas contacts respectively the different treating areas 1a, 1b of the treating object 1, facing the jet ports 11a, 11b, and the treating areas 1a, 1b are plasma-treated. COPYRIGHT: (C)2007,JPO&INPIT