LITHOGRAPHY DEVICE AND CONTROL METHOD

PROBLEM TO BE SOLVED: To provide a controller for controlling a movable part and a positional amount relative to the movable part at a high speed and high precision. SOLUTION: The controller comprises a first controller movement function and a second controller movement function. A selector selects...

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Bibliographische Detailangaben
Hauptverfasser:	KAMIDI RAMIDIN I, DE VOS YOUSSEF KAREL MARIA, KUNST RONALD C, TSO YIN TIM
Format:	Patent
Sprache:	eng
Schlagworte:	APPARATUS SPECIALLY ADAPTED THEREFOR BASIC ELECTRIC ELEMENTS CINEMATOGRAPHY CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION ORPROCESSING OF GOODS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY ELECTROGRAPHY GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS HOLOGRAPHY MATERIALS THEREFOR ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS SEMICONDUCTOR DEVICES TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINSTCLIMATE CHANGE
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To provide a controller for controlling a movable part and a positional amount relative to the movable part at a high speed and high precision. SOLUTION: The controller comprises a first controller movement function and a second controller movement function. A selector selects a first controller movement function CON1 or a second controller movement function CON2 depending on the state of the movable part. The first controller movement function CON1 is selected when the movable part is substantially in a standstill state, and the second controller movement function CON2 is selected when the movable part is substantially in non-stationary state. COPYRIGHT: (C)2007,JPO&INPIT