FINE SUCTION STRUCTURE AND ITS FORMING METHOD

PROBLEM TO BE SOLVED: To provide a sample fine suction structure capable of moving a fluid without depending on the physical properties of matter to be used and using a special outside drive device such as an outside pump, usable alone and able to incorporate, and its forming method. SOLUTION: The f...

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Bibliographische Detailangaben
Hauptverfasser:	HIODA SHINICHI, OGINO KAZUYA
Format:	Patent
Sprache:	eng
Schlagworte:	CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES MICROSTRUCTURAL TECHNOLOGY PERFORMING OPERATIONS PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL PHYSICS PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTUREOR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS TESTING TRANSPORTING
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To provide a sample fine suction structure capable of moving a fluid without depending on the physical properties of matter to be used and using a special outside drive device such as an outside pump, usable alone and able to incorporate, and its forming method. SOLUTION: The fine suction structure is constituted so that an inside space separated by an isolation layer lies above a vacuum space of which the pressure is reduced to atmospheric pressure or below, with a cover layer above this space for covering the inside space, a bridge part in the inside space for transmitting the force from outside to the isolation space to destroy a part of the isolation space, and with the flow channel space connected to the inner space and the outside space. COPYRIGHT: (C)2007,JPO&INPIT