FAN FILTER UNIT
PROBLEM TO BE SOLVED: To provide a fan filter unit adapted to blow out sucked air from an outlet port through a filter by the effect of a fan driven by a motor and purify a manufacturing device or a clean room, in which necessity of maintenance can be determined from a current value carried to the m...
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Format: | Patent |
Sprache: | eng |
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Zusammenfassung: | PROBLEM TO BE SOLVED: To provide a fan filter unit adapted to blow out sucked air from an outlet port through a filter by the effect of a fan driven by a motor and purify a manufacturing device or a clean room, in which necessity of maintenance can be determined from a current value carried to the motor. SOLUTION: This fan filter unit comprises the motor 6 rotating the fan 5 provided within a main body 4 having a suction port 1 and the blow out 3, a current detection means 7 detecting current carried to the motor 6, and a first control means 8 capable of performing comparative determination of a detected current value with a preset determined value. When the current carried to the motor 6 is out of the predetermined value, necessity of maintenance is determined. COPYRIGHT: (C)2007,JPO&INPIT |
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