POSITIONING STAGE AND TRANSPORT SYSTEM USING IT

PROBLEM TO BE SOLVED: To provide a positioning stage in which a space occupied by a workpiece feeding means is minimized and cost for building a transport system is reduced, and to provide a transport system utilizing it. SOLUTION: In the positioning stage, a pair of X-axis linear motors for moving...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	HIGUCHI HARUO, SEKIJIMA SATOSHI, MORISADA TAISHIN
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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