POSITIONING STAGE AND TRANSPORT SYSTEM USING IT

PROBLEM TO BE SOLVED: To provide a positioning stage in which a space occupied by a workpiece feeding means is minimized and cost for building a transport system is reduced, and to provide a transport system utilizing it. SOLUTION: In the positioning stage, a pair of X-axis linear motors for moving a slider in an X-axis direction are arranged in parallel, and a Y-axis linear motor is provided to a bridge member bridging the sliders of a pair of the X-axis linear motors, to perform a specified process for a workpiece to be worked by using a tool mounted on the slider of the Y-axis linear motor. The positioning stage comprises the workpiece feeding means which supports the workpiece and moves it in the X-axis direction to transport the workpiece to the outside of the stage. COPYRIGHT: (C)2007,JPO&INPIT