METHOD AND DEVICE FOR SORTING SEMICONDUCTOR DEVICE

PROBLEM TO BE SOLVED: To provide a method and a device for sorting a semiconductor device capable of efficiently excluding the semiconductor device that can be defective after shipping to a market. SOLUTION: The wafer main surface in which semiconductor devices, to be sorted, are formed is divided into a plurality of regions. Based on the inspection data acquired by inspection during a manufacturing process of semiconductor devices, a defective inspection rate for divided regions is calculated. The regions are determined whether they are defective one or correct one based on the defective inspection rate, and a sorting data are generated in which the semiconductor devices belonging to a defective region are all considered as defective. Thus, such sorting data can be generated as a semiconductor device which is to be taken as defective is taken as defective among the semiconductor devices that have been considered as correct in the inspection. COPYRIGHT: (C)2007,JPO&INPIT