METHOD FOR MANUFACTURING THIN FILM MAGNETIC HEAD

PROBLEM TO BE SOLVED: To provide a method for manufacturing a thin film magnetic head by which the short-circuit between coil conductors can be suppressed by a simple process and a part between the coil conductors can appropriately be filled with an insulating layer. SOLUTION: An inorganic insulating layer 11 is formed along at least the side wall surface 10c of each conductor part 10a of a lower coil layer 10, a part between the conductor parts 10a is filled with an organic insulating layer 12, and the upper surface 10b of the conductor part 10a, a magnetic pole part 7, and a connection layer 8 are polished together with the organic and the inorganic insulating layers 12 and to be on the same plane. During the polishing of the upper surface 10b of each conductor part 10a, the hard inorganic insulating layer 11 suppresses the slackening of each conductor part 10a caused by the polishing, and short-circuiting between the conductor parts 10a is properly prevented. By filling the part between the conductor parts 10a with the organic insulating layer 12, the part between the conductor parts 10a is properly filled without forming any cavities between the conductor parts 10a. COPYRIGHT: (C)2007,JPO&INPIT