SEMICONDUCTOR CHECKING BOARD

PROBLEM TO BE SOLVED: To provide a less expensive probe card in which inherent data read automatically upon loading is recorded on the probe card itself. SOLUTION: The probe card 30 is provided with connection terminals 31v to 31z for recording an inherent number of the probe card 30. For these connection terminals 31v to 31z, surplus connection terminals which are not used for checking are utilized. The connection terminal 31v is used for a power supply, the connection terminal 31z for the ground, and the connection terminals 31w to 31y for holding data. Upon loading the probe card 30; a potential of the connection terminals 31w, 31x becomes at H level, and a potential of the connection terminal 31y becomes at L level. These potentials are arranged as the inherent data of the probe card 30. COPYRIGHT: (C)2007,JPO&INPIT