SENSOR SYSTEM

PROBLEM TO BE SOLVED: To provide a sensor system capable of suppressing aging of offset voltage maintaining low cost. SOLUTION: A magnetic sensor 1 detects the variation of magnetism, based on the variation of each electric resistance value of magnetoresistive elements 31 to 34 according to a magnet...

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Bibliographische Detailangaben
Hauptverfasser:	MINAGAWA TORU, ISHIZAKI YOICHI, SUZUKI FUMIHIRO
Format:	Patent
Sprache:	eng
Schlagworte:	ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVEREDIN A SINGLE OTHER SUBCLASS ELECTRICITY MEASURING MEASURING ELECTRIC VARIABLES MEASURING MAGNETIC VARIABLES MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR PHYSICS TARIFF METERING APPARATUS TESTING
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To provide a sensor system capable of suppressing aging of offset voltage maintaining low cost. SOLUTION: A magnetic sensor 1 detects the variation of magnetism, based on the variation of each electric resistance value of magnetoresistive elements 31 to 34 according to a magnetism variation. The magnetic sensor 1 includes a metal film 15 which conducts heat given from outside to each of the magnetoresistive elements 31 to 34. A metal film 15 is provided so as to overlap to all magnetoresistive elements 31 to 34. Protection films (inter-layer insulation film 40, passivation film 60) are provided with a heat-treated part 70 melted by heat given from outside in accordance with each metal film 15. When the heat-treated part 70 is irradiated with laser heat is given to the heat-treated part 70 and the heat-treated part 70 is melted. As a result, a molten part 80 is formed in the heat-treated part 70. COPYRIGHT: (C)2007,JPO&INPIT