SCANNING ELECTRON MICROSCOPE AND METHOD OF CONTROLLING FOCUS THEREOF

PROBLEM TO BE SOLVED: To improve total throughput of a scanning electron microscope. SOLUTION: Information related to a sample such as height of the sample, alignment information or the like are obtained from the sample 5 housed in a load lock part 15 by sample information obtaining means like heigh...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	TOGAWA KENICHI, YOSHIIE MITSUYOSHI
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRICITY
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