SCANNING ELECTRON MICROSCOPE AND METHOD OF CONTROLLING FOCUS THEREOF
PROBLEM TO BE SOLVED: To improve total throughput of a scanning electron microscope. SOLUTION: Information related to a sample such as height of the sample, alignment information or the like are obtained from the sample 5 housed in a load lock part 15 by sample information obtaining means like heigh...
Gespeichert in:
| Hauptverfasser: | , |
|---|---|
| Format: | Patent |
| Sprache: | eng |
| Schlagworte: | |
| Online-Zugang: | Volltext bestellen |
| Tags: |
Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
|
| Zusammenfassung: | PROBLEM TO BE SOLVED: To improve total throughput of a scanning electron microscope. SOLUTION: Information related to a sample such as height of the sample, alignment information or the like are obtained from the sample 5 housed in a load lock part 15 by sample information obtaining means like height detecting equipment or an optical microscope 30 arranged on the load lock part 15, in parallel with pressure reduction work executed when transferring the sample 5 from the load lock part 15 to a sample chamber 22. COPYRIGHT: (C)2007,JPO&INPIT |
|---|