STATIC PRESSURE JOINT

PROBLEM TO BE SOLVED: To provide a static pressure joint with high rigidity and accuracy capable of ensuring positioning of, for example, a nano order. SOLUTION: One of a first or second members 4, 5, 6 in the movable table 100 side and the other in a feed gear 2 are provided, and first and second acceptance faces 11, 12 on both the faces of the first member are provided and third and fourth acceptance faces 13, 14 each opposed to a first and a second acceptance faces with a micro-clearance on the second member are provided and a static pressure bearing is formed by a restriction 20 between the first and the third acceptance faces and a static element 30 having an opening face advancing and retracting to/from the second acceptance faces is provided in the fourth acceptance face side to be a controllable static bearing 15 and, comparing an output signal of a measuring device to measure the second and the fourth acceptance distance h with a setting signal of the setting device and if the output signal is larger than the setting signal, the opening face 33 is moving to the second acceptance and if the output signal is smaller than the setting signal, the opening face is controlled to leave. The static pressure joint 1 controls the distance of the second and the fourth acceptance faces. COPYRIGHT: (C)2007,JPO&INPIT