METHOD FOR MANUFACTURING ALUMINUM SYSTEM SUPERCONDUCTING PHOTON DETECTOR AND ALUMINUM SYSTEM SUPERCONDUCTING PHOTON DETECTOR

PROBLEM TO BE SOLVED: To provide a superconducting photon detector using aluminum as a superconductive material. SOLUTION: The method for manuacturing the Al system superconducting photon detector comprises steps of laminating the Al thin film as the superconducting material on the substrate for the superconducting photon detector, forming a mask on the Al thin film by resist treatment, and housing the substrate and the Al thin film in a chamber. Further, the method comprises steps of generating plasma in the chamber by a plasma generating means by introducing gas for etching into the chamber, and increasing plasma density in the chamber by the high plasma density means to etch the Al thin film by the use of the density-increased plasma. COPYRIGHT: (C)2007,JPO&INPIT