METHOD FOR MANUFACTURING HEATING RESISTANCE ELEMENT COMPONENT, THERMAL HEAD MANUFACTURED USING THIS METHOD AND PRINTER

PROBLEM TO BE SOLVED: To manufacture a heating resistance element component easily and at a low cost by reducing power consumption through improvement of the heating efficiency of a heating resistor and further, improving the strength of a substrate under the heating resistor. SOLUTION: The method for manufacturing the heating resistance element component comprises the following steps: (1) a step to form a sacrificial layer-embedded substrate, for the formation of the sacrificial layer-embedded substrate, in which a plurality of columnar sacrificial layers passing through in the thickness direction are embedded, (2) a step to form an insulating coating film for the formation of the insulating coating film in the surface of the sacrificial layer-embedded substrate, (3) a step to form the heating resistor for the formation of the heating resistor on the surface of the formed insulating coating film, in a region covering the columnar sacrificial layer, (4) a step to form wiring for the formation of wiring connected with the heating resistor, and (5) a step to form a cavity part for the formation of the cavity part passing through the substrate in the thickness direction by removing the columnar sacrificial layer from the back of the sacrificial layer-embedded substrate by wet etching process. COPYRIGHT: (C)2007,JPO&INPIT