MANUFACTURING METHOD OF MICROSENSOR, MANUFACTURING METHOD OF MOLD FOR MICROSENSOR AND MICROSENSOR

PROBLEM TO BE SOLVED: To provide a manufacturing method of a microsensor or the like capable of forming a complicated three-dimensional structure precisely, rapidly and simply. SOLUTION: In the manufacturing method of the microsensor, a photosetting resin liquid is selectively irradiated with light...

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Bibliographische Detailangaben
Hauptverfasser:	TERAMOTO TOSHIO, MOROHOSHI KIMITAKA, MITSUI MUNEHIRO
Format:	Patent
Sprache:	eng
Schlagworte:	AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING MICROSTRUCTURAL TECHNOLOGY PERFORMING OPERATIONS PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTUREOR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDEDFOR SHAPING OR JOINING OF PLASTICS TRANSPORTING WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To provide a manufacturing method of a microsensor or the like capable of forming a complicated three-dimensional structure precisely, rapidly and simply. SOLUTION: In the manufacturing method of the microsensor, a photosetting resin liquid is selectively irradiated with light to form a cured resin layer by repeating collective exposure using a projection region as a unit to form a cured resin layer and the cured resin layer is successively laminated to form a three-dimensional shape. This manufacturing method is especially effective in the case that the structure of the microsensor or the like is the complicated three-dimensional structure having an overhang part. COPYRIGHT: (C)2007,JPO&INPIT