PLASMA GENERATION DEVICE, PLASMA GENERATION METHOD, AND DIAMOND GENERATION METHOD

PROBLEM TO BE SOLVED: To provide a plasma generation device and a plasma generation method which are performed at relatively high pressure, and generating high energy plasma capable of generating diamond. SOLUTION: The plasma generation device 1 has: a reaction container 2, a first gas supplying dev...

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Hauptverfasser:	NOMURA NOBUFUKU, YAGI HIDEJI, TOYODA HIROMICHI
Format:	Patent
Sprache:	eng
Schlagworte:	CHEMISTRY COMPOUNDS THEREOF ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR ELECTRICITY INORGANIC CHEMISTRY METALLURGY NON-METALLIC ELEMENTS PLASMA TECHNIQUE PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OFNEUTRONS PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMICBEAMS
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To provide a plasma generation device and a plasma generation method which are performed at relatively high pressure, and generating high energy plasma capable of generating diamond. SOLUTION: The plasma generation device 1 has: a reaction container 2, a first gas supplying device 5 supplying argon-containing gas to the reaction container 2; a second gas supplying device 6 supplying hydrocarbon-containing gas; and a microwave introduction device 10 introducing microwave of 1 GHz or higher to the reaction container 2. COPYRIGHT: (C)2007,JPO&INPIT