PLASMA GENERATION DEVICE, PLASMA GENERATION METHOD, AND DIAMOND GENERATION METHOD

PLASMA GENERATION DEVICE, PLASMA GENERATION METHOD, AND DIAMOND GENERATION METHOD

PROBLEM TO BE SOLVED: To provide a plasma generation device and a plasma generation method which are performed at relatively high pressure, and generating high energy plasma capable of generating diamond. SOLUTION: The plasma generation device 1 has: a reaction container 2, a first gas supplying dev...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: NOMURA NOBUFUKU, YAGI HIDEJI, TOYODA HIROMICHI
Format: Patent
Sprache:eng
Schlagworte:
CHEMISTRY
COMPOUNDS THEREOF
ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
INORGANIC CHEMISTRY
METALLURGY
NON-METALLIC ELEMENTS
PLASMA TECHNIQUE
PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OFNEUTRONS
PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMICBEAMS
Online-Zugang:Volltext bestellen
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
Beschreibung
Zusammenfassung:PROBLEM TO BE SOLVED: To provide a plasma generation device and a plasma generation method which are performed at relatively high pressure, and generating high energy plasma capable of generating diamond. SOLUTION: The plasma generation device 1 has: a reaction container 2, a first gas supplying device 5 supplying argon-containing gas to the reaction container 2; a second gas supplying device 6 supplying hydrocarbon-containing gas; and a microwave introduction device 10 introducing microwave of 1 GHz or higher to the reaction container 2. COPYRIGHT: (C)2007,JPO&INPIT