VACUUM CARRIER AND CHARGED PARTICLE RAY INSPECTION DEVICE EQUIPPED THEREWITH

PROBLEM TO BE SOLVED: To achieve a vacuum carrier of simple structure for exchanging operation of a sample in a short time, and to provide a charged particle ray inspection device of less footprint and improved throughput. SOLUTION: A vacuum carrier 26 comprises an arm 1 that can be rotated and vert...

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Bibliographische Detailangaben
1. Verfasser:	TOMITA SHOJI
Format:	Patent
Sprache:	eng
Schlagworte:	APPARATUS SPECIALLY ADAPTED THEREFOR BASIC ELECTRIC ELEMENTS CINEMATOGRAPHY CONVEYING ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY ELECTROGRAPHY HANDLING THIN OR FILAMENTARY MATERIAL HOLOGRAPHY INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MATERIALS THEREFOR MEASURING MEASURING ANGLES MEASURING AREAS MEASURING IRREGULARITIES OF SURFACES OR CONTOURS MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS ORIGINALS THEREFOR PACKING PERFORMING OPERATIONS PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS PNEUMATIC TUBE CONVEYORS SEMICONDUCTOR DEVICES SHOP CONVEYOR SYSTEMS STORING TESTING TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING ORTIPPING TRANSPORTING
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To achieve a vacuum carrier of simple structure for exchanging operation of a sample in a short time, and to provide a charged particle ray inspection device of less footprint and improved throughput. SOLUTION: A vacuum carrier 26 comprises an arm 1 that can be rotated and vertically operated by two drive sources 2 and 10. On both ends of the arm 1, first hand 22 and second hand 23 are arranged with a space in the vertical direction that are supported to rotate as the arm 1 rotates for placing a sample. Transportation and exchange of a sample is allowed only by control of rotation and vertical operation of the arm 1. The vacuum carrier 26 is arranged not in a preliminary exhaust chamber of the charged vertical beam inspection device but in a vacuum sample chamber. COPYRIGHT: (C)2007,JPO&INPIT