NOBLE METAL ELECTRODE FOR ELECTROLYSIS, AND ITS MANUFACTURING METHOD

PROBLEM TO BE SOLVED: To provide an electrode for an alkali ion water generator, which has a Pt layer on a Ti electrode base material and whose lifetime is prolonged though the thickness of the Pt layer is thinner than the conventional one, and also to provide its manufacturing method. SOLUTION: The...

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Hauptverfasser:	KIMURA YASUHIKO, SUZUKI HIROSHI, KIUCHI JUNSUKE
Format:	Patent
Sprache:	eng
Schlagworte:	APPARATUS THEREFOR CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL ELECTROLYTIC OR ELECTROPHORETIC PROCESSES ELECTROLYTIC OR ELECTROPHORETIC PROCESSES FOR THE PRODUCTIONOF COMPOUNDS OR NON-METALS INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To provide an electrode for an alkali ion water generator, which has a Pt layer on a Ti electrode base material and whose lifetime is prolonged though the thickness of the Pt layer is thinner than the conventional one, and also to provide its manufacturing method. SOLUTION: The Ti electrode base material is placed in a sputtering apparatus, TiO2present on the surface is removed by the etching using Ar gas, and a Ti sputter layer is formed by sputtering Ti by using a Ti target. Next, the sputter layer of TiCN is formed by introducing acetylene and gaseous nitrogen in the atmosphere. Finally, Pt sputtering is performed to form a Pt surface layer. The electrode having the surface layer configuration of (inside) (surface) Ti electrode base material/Ti sputter layer/TiCN sputter layer/Pt sputter layer is obtained. COPYRIGHT: (C)2007,JPO&INPIT