COATING FILM HOLDER, ITS PRODUCTION METHOD AND IMMERSION COATER
PROBLEM TO BE SOLVED: To provide a coating film holder not causing a step or unevenness and excellent in productivity, its production method and an immersion coater. SOLUTION: The immersion coater is provided with a coating means for coating a cylindrical substrate with a coating liquid; a coating l...
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Zusammenfassung: | PROBLEM TO BE SOLVED: To provide a coating film holder not causing a step or unevenness and excellent in productivity, its production method and an immersion coater. SOLUTION: The immersion coater is provided with a coating means for coating a cylindrical substrate with a coating liquid; a coating liquid retaining means for containing the coating liquid; and a coating liquid movement part having a coating liquid retaining means provided between the coating liquid retaining means and the coating means for moving the coating liquid between the two. The immersion coater has a pressurization means for transferring the coating liquid from the coating liquid retaining means to the coating means through the coating liquid movement part by applying a pressure to the coating liquid in the coating liquid retaining means. Further, in the production method for the coating film holder, a pressurization treatment for transferring the coating liquid from the coating liquid retaining means to the coating means by pressurizing the coating liquid in the coating liquid retaining means is applied when the coating liquid is fed to the coating means. Further, the coating film holder is produced by the production method for the coating film holder. COPYRIGHT: (C)2007,JPO&INPIT |
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