BUMP AND ITS FORMATION METHOD
PROBLEM TO BE SOLVED: To provide a bump which has excellent durability enough to be stably for a long time, and to provide its formation method. SOLUTION: The bump is formed by sintering one or more kinds of metallic powder selected among a gold powder, a silver powder, a plutinum powder, or a parad...
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Zusammenfassung: | PROBLEM TO BE SOLVED: To provide a bump which has excellent durability enough to be stably for a long time, and to provide its formation method. SOLUTION: The bump is formed by sintering one or more kinds of metallic powder selected among a gold powder, a silver powder, a plutinum powder, or a paradium powder whose purity is 99.9 wt% and average particle size is 0.005-1.0 μm. The particular shape of the metallic powder after sintered and that before sintered are nearly identical, and a material structure shows surface-contact state of the metallic powder particles. In this case, sintering temperature (Ts) during sintering is set to a temperature range that the melting point (Tm) of the metallic powder is multiplied by 0.3-0.50. COPYRIGHT: (C)2007,JPO&INPIT |
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