RADIATION SOURCE, LITHOGRAPHIC APPARATUS, AND DEVICE MANUFACTURING METHOD

PROBLEM TO BE SOLVED: To improve efficiency of conversion of electrical energy to radiation. SOLUTION: To improve conversion efficiency of a radiation source including an anode and a cathode, the anode and the cathode being configured and arranged to create a discharge in a substance in a space betw...

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Bibliographische Detailangaben
Hauptverfasser:	BANINE VADIM YEVGENYEVICH, ZUKAVISHVILI GIVI GEORGIEVITCH, IVANOV VLADIMIR VITAL'EVITCH, KOROB EVGENII DMITREEVITCH, PAVEL STANISLAVOVICH ANTSIFEROV, KOSHELEV KONSTANTIN NIKOLAEVITCH
Format:	Patent
Sprache:	eng
Schlagworte:	APPARATUS SPECIALLY ADAPTED THEREFOR BASIC ELECTRIC ELEMENTS BLASTING CINEMATOGRAPHY ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR ELECTRICITY ELECTROGRAPHY GAMMA RAY OR X-RAY MICROSCOPES HEAT EXCHANGE IN GENERAL HEAT-EXCHANGE APPARATUS, NOT PROVIDED FOR IN ANOTHER SUBCLASS,IN WHICH THE HEAT-EXCHANGE MEDIA DO NOT COME INTO DIRECT CONTACT HEATING HOLOGRAPHY IRRADIATION DEVICES LIGHTING MATERIALS THEREFOR MECHANICAL ENGINEERING NUCLEAR ENGINEERING NUCLEAR PHYSICS ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS PLASMA TECHNIQUE PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OFNEUTRONS PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMICBEAMS SEMICONDUCTOR DEVICES TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOTOTHERWISE PROVIDED FOR WEAPONS X-RAY TECHNIQUE
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Zusammenfassung:	PROBLEM TO BE SOLVED: To improve efficiency of conversion of electrical energy to radiation. SOLUTION: To improve conversion efficiency of a radiation source including an anode and a cathode, the anode and the cathode being configured and arranged to create a discharge in a substance in a space between the anode and cathode and to form plasma so as to generate electromagnetic radiation, the radiation source unit is constructed to have a low inductance and to operate with a minimum of plasma. To improve heat dissipation, a fluid circulation system is created within the radiation source space and a wick by using a fluid in both its vapor and liquid phases. To prevent contamination from entering a lithographic projection apparatus, the radiation source unit is constructed to minimize the production of contamination, and a trap is employed to capture the contamination without interfering with the emitted radiation. COPYRIGHT: (C)2007,JPO&INPIT