MICROSCOPE WITH PROBE, AND PROBE CONTACT METHOD

PROBLEM TO BE SOLVED: To rapidly comprehend three-dimensional coordinate of the probe tip. SOLUTION: The microscope has an image display means displaying a microscopic image 35 obtained by a first charged particle microscope and a microscopic image 36 obtained by a second charged particle microscope simultaneously or by switching, and a calculation processing part controlling the first charged particle microscope, the second charged particle microscope, a stage control system, and a probe driving mechanism. The calculation processing part obtains a three-dimensional relative position of the probe tip against a target position from the microscopic image of the first charged particle microscope in which the target position 23 on a sample and the tip of the probe 6 are contained, and the microscopic image of the second charged particle microscope in which the target position on the sample and the tip of the probe are contained. COPYRIGHT: (C)2007,JPO&INPIT