METHOD FOR REDUCING DEFECT CONCENTRATION IN CRYSTAL
PROBLEM TO BE SOLVED: To provide a method for removing defects or the strain from a non-diamond crystal under high pressure and high temperature (HP/HT) and to provide an electronic device using an improved crystal. SOLUTION: A crystal containing one or more defects and an appropriate pressure mediu...
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Zusammenfassung: | PROBLEM TO BE SOLVED: To provide a method for removing defects or the strain from a non-diamond crystal under high pressure and high temperature (HP/HT) and to provide an electronic device using an improved crystal. SOLUTION: A crystal containing one or more defects and an appropriate pressure medium becoming supercritical fluid under a reaction condition are prepared, and the crystal and the pressure medium are placed in a high pressure cell, and the crystal is treated for a sufficiently long time at the reaction condition of high pressure and temperature for removing the defect or the strain in the crystal. The electronic device is formed, for example, by laminating an epitaxial semiconductor layer on the improved crystal, performing pattern formation and metallization. COPYRIGHT: (C)2007,JPO&INPIT |
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