ARRAY-COATING METHOD AND APPARATUS FOR MICROPARTICLE BY SUPERCRITICAL FLUID

PROBLEM TO BE SOLVED: To provide an array-coating method and apparatus which can perform array-control of microparticles with high precision. SOLUTION: The array-coating method of microparticles fills a material comprising microparticles or microparticles and vehicle, and a fluid in a supercritical state in a high-pressure container, stirs them to prepare a mixture uniformly dispersed with the material and fluid, and sprays the mixture to an object. The stirring is performed by turning stirring blades for generating a rising stream inside the high-pressure container. The array-coating apparatus of microparticles has: a supply part charged with a material comprising microparticles or microparticles and vehicle; a pressure control part for controlling the pressure of the fluid to feed it to a stirring part; the stirring part for stirring the material and the fluid in a supercritical state inside a high-pressure container to prepare a mixture uniformly dispersed with the material and fluid; and a spray part for spraying the mixture. In the apparatus, the stirring part has stirring blades for generating a rising stream inside the high-pressure container. COPYRIGHT: (C)2007,JPO&INPIT