APPARATUS AND METHOD FOR DROPPING LIQUID MATERIAL

PROBLEM TO BE SOLVED: To provide an apparatus or a method for dropping a liquid material for improving a dropping precision of the liquid material. SOLUTION: The apparatus for dropping a liquid material 10 for discharging the liquid material from a nozzle 23 to drop it on a substrate 1 comprises a c...

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1. Verfasser:	TAMAI SHINGO
Format:	Patent
Sprache:	eng
Schlagworte:	APPARATUS FOR APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TOSURFACES, IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TO SURFACES, IN GENERAL DEVICES OR ARRANGEMENTS, THE OPTICAL OPERATION OF WHICH ISMODIFIED BY CHANGING THE OPTICAL PROPERTIES OF THE MEDIUM OF THEDEVICES OR ARRANGEMENTS FOR THE CONTROL OF THE INTENSITY,COLOUR, PHASE, POLARISATION OR DIRECTION OF LIGHT, e.g.SWITCHING, GATING, MODULATING OR DEMODULATING FREQUENCY-CHANGING NON-LINEAR OPTICS OPTICAL ANALOGUE/DIGITAL CONVERTERS OPTICAL LOGIC ELEMENTS OPTICS PERFORMING OPERATIONS PHYSICS PROCESSES FOR APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TOSURFACES, IN GENERAL SPRAYING OR ATOMISING IN GENERAL TECHNIQUES OR PROCEDURES FOR THE OPERATION THEREOF TRANSPORTING
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Zusammenfassung:	PROBLEM TO BE SOLVED: To provide an apparatus or a method for dropping a liquid material for improving a dropping precision of the liquid material. SOLUTION: The apparatus for dropping a liquid material 10 for discharging the liquid material from a nozzle 23 to drop it on a substrate 1 comprises a control apparatus 36 for controlling discharge of the liquid material from the nozzle 23 from a temperature of the liquid material. COPYRIGHT: (C)2007,JPO&INPIT