METHOD AND APPARATUS FOR DRILLING

PROBLEM TO BE SOLVED: To reduce the positional error of holes to be formed on a substrate when a plurality of the holes are drilled at the same time on the substrate by using a plurality of drills. SOLUTION: Workpieces are mounted on a table 3 which can move in the X-direction. A cross slide 6 is arranged above the table 3 and can move in the Y-direction perpendicular to the X-direction. A plurality of spindles 12 are mounted on the cross slide 6. A plurality of tools are supported on the tip ends of the respective spindles 12. Before the holes are drilled on the workpieces, the positional errors of the axes of a plurality of the tools in the X-direction and the Y-direction with respect to the designed axes of the spindles 12 are detected respectively, and the mean value of the detected positional errors for every direction is calculated. Then, the holes are drilled on the workpieces after correcting the coordinates of the axes of a plurality of the spindles 12 by the amount of the mean value for every direction with respect to the coordinates of the centers of the holes to be drilled. COPYRIGHT: (C)2007,JPO&INPIT