BEAM POSITION MEASURING APPARATUS

PROBLEM TO BE SOLVED: To provide a versatile beam position measuring apparatus accurately measuring the scanning position of a laser beam. SOLUTION: The beam position measuring apparatus is provided with: a main body 2; a slider 3 sliding along the main body 2; a beam receiver 6 provided for the sli...

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Bibliographische Detailangaben
Hauptverfasser:	KATSUMATA YUZO, ISHIKAWA HARUHISA
Format:	Patent
Sprache:	eng
Schlagworte:	MEASURING MEASURING ANGLES MEASURING AREAS MEASURING IRREGULARITIES OF SURFACES OR CONTOURS MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS PHYSICS TESTING
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To provide a versatile beam position measuring apparatus accurately measuring the scanning position of a laser beam. SOLUTION: The beam position measuring apparatus is provided with: a main body 2; a slider 3 sliding along the main body 2; a beam receiver 6 provided for the slider 3 for detecting the light intensity of a laser beam; and an operation means 15 for measuring the position of the laser beam on the basis of the light intensity of the laser beam. COPYRIGHT: (C)2007,JPO&INPIT