REACTION VESSEL AND METHOD FOR REACTION

PROBLEM TO BE SOLVED: To properly and easily carry out feeding and recovery of a reaction solution while readily suppressing an evaporation loss of the solution used for a reaction. SOLUTION: A reaction part 12 of the reaction vessel is composed as follows. The reaction part is equipped with a groov...

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1. Verfasser: CHINO MASAAKI
Format: Patent
Sprache:eng
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Zusammenfassung:PROBLEM TO BE SOLVED: To properly and easily carry out feeding and recovery of a reaction solution while readily suppressing an evaporation loss of the solution used for a reaction. SOLUTION: A reaction part 12 of the reaction vessel is composed as follows. The reaction part is equipped with a groove part 21 provided on the back surface 10B of a substrate 10a, a film 23 covering opening ends 21a of the groove part 21, thereby sealing the opening of the groove part 21 and forming a flow channel 22, two through-holes 25 and 25 passing through the substrate 10a in the thickness direction, connected to each of two openings 24 and 24 provided on the surface 10A of the substrate 10a and opening in the interior of the groove part 21 and movable lid parts 26 and 26 provided on the surface 10A of the substrate 10a corresponding to each of the openings 24 and 24 and opening and closing each of the openings 24 and 24. COPYRIGHT: (C)2007,JPO&INPIT