SHAPE MEASURING DEVICE AND SHAPE MEASURING METHOD

PROBLEM TO BE SOLVED: To measure a three-dimensional shape with high accuracy by a probe tracing the surface to be measured. SOLUTION: A target mirror 114 is fixed on the upper end of a probe shaft 106 having a probe tip ball 109, and the separation distance between the first reference mirror 102 fixed to a body pedestal 101 and the target mirror 114 is detected by laser ranging, to thereby acquire surface shape data of a work W. For keeping the pressing force of the probe tip ball 109 to the work W constant, a Z-stage 104 is controlled by a laser ranging system for detecting the separation distance between the second reference mirror 111 on the Z-axis arm 103 for holding the probe shaft 106 and the target mirror 114, and strain of plate springs 107, 108 is adjusted. COPYRIGHT: (C)2007,JPO&INPIT