THIN PLATE MANUFACTURING APPARATUS AND THIN PLATE MANUFACTURING METHOD

PROBLEM TO BE SOLVED: To provide a thin plate manufacturing apparatus and a thin plate manufacturing method capable of obtaining a thin plate comprising a desired crystal sheet with a high non-defective product ratio and in good manufacturing efficiency. SOLUTION: In the thin plat manufacturing appa...

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Bibliographische Detailangaben
1. Verfasser:	GOKAKU HIROZUMI
Format:	Patent
Sprache:	eng
Schlagworte:	AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUSPOLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE APPARATUS THEREFOR CHEMISTRY CRYSTAL GROWTH METALLURGY PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITHDEFINED STRUCTURE REFINING BY ZONE-MELTING OF MATERIAL SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITHDEFINED STRUCTURE SINGLE-CRYSTAL-GROWTH UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL ORUNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To provide a thin plate manufacturing apparatus and a thin plate manufacturing method capable of obtaining a thin plate comprising a desired crystal sheet with a high non-defective product ratio and in good manufacturing efficiency. SOLUTION: In the thin plat manufacturing apparatus and the thin plate manufacturing method, a substrate is immersed in a melt, and a thin plate is formed on the surface of the substrate by crystal growth from the melt. The melt is obtained by melting a solid raw material containing a metal material and/or a semiconductor material in a crucible, and for the thin plate manufacturing apparatus, a shielding wall which can be positioned right above the crucible and is equipped with an exhaust mechanism for gases to be generated from the melt, is installed. COPYRIGHT: (C)2007,JPO&INPIT