ANGULAR VELOCITY SENSOR AND ITS MANUFACTURING METHOD

PROBLEM TO BE SOLVED: To provide an angular velocity sensor and its manufacturing method which make the certainty of sealing compatible with miniaturization. SOLUTION: The angular velocity sensor is equipped with a first structure which has a stationary portion having an opening, a displacement port...

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Bibliographische Detailangaben
Hauptverfasser:	HASHIMOTO KATSUMI, TAKEI SHIGEO
Format:	Patent
Sprache:	eng
Schlagworte:	ELECTRICITY GYROSCOPIC INSTRUMENTS MEASURING MEASURING DISTANCES, LEVELS OR BEARINGS NAVIGATION PHOTOGRAMMETRY OR VIDEOGRAMMETRY PHYSICS SURVEYING TESTING
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To provide an angular velocity sensor and its manufacturing method which make the certainty of sealing compatible with miniaturization. SOLUTION: The angular velocity sensor is equipped with a first structure which has a stationary portion having an opening, a displacement portion arranged inside this opening, and a connecting portion connecting the stationary portion to the displacement portion; a second structure which has a weight portion jointed to the displacement portion; and a seating arranged surrounding the weight portion and jointed to the stationary portion, and is laminated and arranged on the first structure; a first substrate which is composed by laminating a first metal layer and a first insulating layer, is connected to the stationary portion at its first insulating layer side, and is laminated/arranged on the first structure; and a second substrate which is composed by laminating a second metal layer and a second insulating layer, is connected to the seating at its second insulating layer side, and laminated/arranged on the second structure. COPYRIGHT: (C)2007,JPO&INPIT