HIGH PRESSURE FLUID SUPPLY DEVICE AND SEALING DEVICE FOR TREATMENT EQUIPMENT MOUNTED THEREWITH

PROBLEM TO BE SOLVED: To provide a high pressure fluid supply device for actualizing good flow of high pressure fluid such as seal gas between a metal member and a plastic member without causing leakage even when the plastic member is deformed. SOLUTION: In the high pressure fluid supply device, the end of a first gas passage 111 formed in a metal seal case 6 and the end of a second gas passage 112 formed in a plastic cover body 3 are opened at opposed face portions 31a, 61a of both members 3, 6 and the opening ends of both gas passages 111, 112 are connected in communication with each other in the state of being sealed by fluororubber O-rings 63, 64 filled between the opposed face portions 31a, 61a. Thus, the high pressure fluid 10 can flow between both gas passages 111, 112. The O-rings 63, 64 each having a hardness of Hs60 or less are filled between the opposed face portions 31a, 61a at a compression ratio of 5-40%. COPYRIGHT: (C)2007,JPO&INPIT