ELECTRON BEAM ADJUSTMENT METHOD AND OPTICAL DISK MASTER DRAWING DEVICE USING THIS METHOD

PROBLEM TO BE SOLVED: To provide an electron beam adjustment method to create a highly precise focus mark which has a high coaxial level with a center of rotation of a rotary table and uniform groove depth on a substrate which forms a focus mark, and an optical disk master drawing device using this...

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Bibliographische Detailangaben
1. Verfasser: MURAYAMA NOBORU
Format: Patent
Sprache:eng
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