ELECTRON BEAM ADJUSTMENT METHOD AND OPTICAL DISK MASTER DRAWING DEVICE USING THIS METHOD
PROBLEM TO BE SOLVED: To provide an electron beam adjustment method to create a highly precise focus mark which has a high coaxial level with a center of rotation of a rotary table and uniform groove depth on a substrate which forms a focus mark, and an optical disk master drawing device using this...
Gespeichert in:
1. Verfasser: | |
---|---|
Format: | Patent |
Sprache: | eng |
Schlagworte: | |
Online-Zugang: | Volltext bestellen |
Tags: |
Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
|
Schreiben Sie den ersten Kommentar!