SCANNING MIRROR, METHOD OF MANUFACTURING SAME, AND LASER BEAM MACHINE
PROBLEM TO BE SOLVED: To provide a scanning mirror of which the flatness can be kept excellent even when high energy machining is performed, a method of manufacturing the scanning mirror and a laser beam machine. SOLUTION: The scanning mirror comprises a scanning mirror main body 3 made of a ceramic...
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| Zusammenfassung: | PROBLEM TO BE SOLVED: To provide a scanning mirror of which the flatness can be kept excellent even when high energy machining is performed, a method of manufacturing the scanning mirror and a laser beam machine. SOLUTION: The scanning mirror comprises a scanning mirror main body 3 made of a ceramic material, and a metallic film 6 having a linear expansion coefficient in the range of 0.7β to 1.5β with respect to a linear expansion coefficient β of the ceramic material on the scanning mirror main body 3. COPYRIGHT: (C)2007,JPO&INPIT |
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