DIAMOND SEMICONDUCTOR AND MANUFACTURING METHOD THEREOF

PROBLEM TO BE SOLVED: To provide an economical manufacturing method of a diamond semiconductor for growing a p-doped n-type diamond on a ä100} substrate. SOLUTION: After a diamond film whose thickness is ≥0.1 μm is grown on a diamond substrate under the nitrogen addition condition of a nitrogen conc...

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Hauptverfasser: NISHIBAYASHI YOSHIKI, CHIKUNO TAKASHI
Format: Patent
Sprache:eng
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