WIRING STRUCTURE AND MANUFACTURING METHOD FOR OPTICAL SCANNER
PROBLEM TO BE SOLVED: To provide a wiring structure and a manufacturing method for an optical scanner. SOLUTION: The optical scanner includes: a glass substrate (10) on which a metallic wire wiring region is etched to a predetermined depth; a metallic wiring formed in the metallic wire wiring region...
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| Zusammenfassung: | PROBLEM TO BE SOLVED: To provide a wiring structure and a manufacturing method for an optical scanner. SOLUTION: The optical scanner includes: a glass substrate (10) on which a metallic wire wiring region is etched to a predetermined depth; a metallic wiring formed in the metallic wire wiring region; a diffusion blocking layer (112) so formed as to cover the metallic wire on the glass substrate; and an optical scanner structure connected to the glass substrate (10). COPYRIGHT: (C)2007,JPO&INPIT |
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